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2023-12-31 08:16:48 +01:00
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commit b9b1b73be9
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606,0.413,0.455,43902,317.25,912,1586,317
607,0.417,0.437,49721,305,761,1678,313.5
608,0.417,0.4345,44111,304,844,1720,312.5
609,0.417,0.4515,54334,316.5,877,1918,311
610,0.425,0.43825,44336,304.5,794,1418,318.5
611,0.413,0.42875,43998,305,802,1582,303
612,0.413,0.4445,47953,325,978,1549,317.5
613,0.417,0.45125,48387,326.5,966,1923,330.5
614,0.417,0.4365,55621,314.25,1040,2174,326.5
615,0.417,0.439,47891,302.75,1003,1657,320
616,0.413,0.43925,50782,311,696,1458,310.5
617,0.417,0.43675,52631,313.25,1080,1981,310
618,0.433,0.44725,54383,323,998,1783,330
619,0.425,0.44,48757,316,1024,1550,313
620,0.417,0.42875,48564,305.75,877,1880,299
621,0.425,0.44375,48001,310,945,1568,306
622,0.419,0.40975,46956,304.75,1076,1790,313
623,0.425,0.43875,51924,315,870,1684,303
624,0.425,0.42825,46780,302.5,842,1633,315.5
625,0.417,0.4435,46506,306.5,926,1568,307
626,0.417,0.44175,56328,320,1101,2116,304.5
627,0.417,0.42375,42150,313.5,901,1470,323.5
628,0.417,0.43425,45590,304.5,696,1446,309
629,0.421,0.4290525,52310,300.5,796,1687,316.5
630,0.417,0.4295,48644,417.6666667,833,1722,313
631,0.417,0.4555,48580,303.5,772,1419,293.5
632,0.417,0.4355,43548,299.75,807,1423,299.5
633,0.425,0.4215,43580,298.5,940,1516,299.5
634,0.425,0.445,48371,305,891,1568,312
635,0.425,0.44625,47664,315.5,884,1594,322.5
636,0.421,0.43525,45494,311.25,966,1620,305.5
637,0.421,0.438,52100,306,770,1724,314
638,0.421,0.44625,59334,316.25,912,2170,322
639,0.417,0.4425,48258,326,989,1799,314
640,0.421,0.43025,49126,311.75,1003,1526,300
641,0.413,0.4465,47053,316.75,761,1668,321
642,0.413,0.43975,45638,309.5,854,1517,315
643,0.421,0.4205,47374,299,863,1769,315
644,0.421,0.437,46522,300,842,1678,317
645,0.421,0.432,43146,297.75,747,1382,295.5
646,0.417,0.42925,46274,321.75,1018,1519,318
647,0.417,0.423,44208,304.75,980,1608,286.5
648,0.417,0.42525,47245,311.25,984,1535,301.5
649,0.425,0.46625,50139,314.25,910,1561,304
650,0.421,0.432,51747,312.75,872,1549,317.5
651,0.421,0.424,42278,307.25,854,1433,304
652,0.429,0.44425,50548,311.75,864,1496,313
653,0.421,0.42675,42970,294.25,770,1354,287.5
1 Batch Diameter Etch1 Film-Thickness Etch2 Line-Width Overlay Volume
2 1 0.429 0.43025 49512 308.75 810 1759 315.5
3 2 0.421 0.433 47101 306.75 824 1746 305.5
4 3 0.417 0.4285 60023 311.75 765 1482 330.5
5 4 0.421 0.43775 55428 322.75 933 1857 319.5
6 5 0.421 0.41725 46442 312.5 686 1844 323.5
7 6 0.425 0.44075 45539 309.25 1400 1584 314.5
8 7 0.421 0.42275 51492 311.75 864 1689 319.5
9 8 0.425 0.43175 47661 301 858 1782 299
10 9 0.427 0.44225 70638 304.25 252 1572 319.5
11 10 0.421 0.42875 45944 339.75 255 1377 289
12 11 0.421 0.43925 56955 330.25 968 1848 315.5
13 12 0.417 0.4245 37616 314 473 1689 318.5
14 13 0.421 0.43175 47953 321.25 840 1528 305.5
15 14 0.427 0.4295 51891 331.75 1034 1913 316.5
16 15 0.425 0.43025 42608 306 784 1648 298.5
17 16 0.425 0.44275 60625 316 796 1470 320
18 17 0.427 0.4275 42359 295.5 746 1398 306.5
19 18 0.421 0.43925 46554 307.25 1245 1452 304
20 19 0.421 0.44575 49564 315 728 1377 314.5
21 20 0.421 0.4425 47824 318.5 870 1433 304
22 21 0.421 0.43 48516 305.5 842 1573 298.5
23 22 0.425 0.42675 75703 306 654 1349 307
24 23 0.433 0.439 53064 314 1003 1732 317.5
25 24 0.421 0.4215 51152 304 740 1578 307
26 25 0.421 0.42675 45172 314.5 821 1507 325
27 26 0.421 0.4275 49898 297.5 620 1628 297.5
28 27 0.421 0.43825 43420 315.25 200 1440 303
29 28 0.421 0.4575 49625 318.5 729 1482 316
30 29 0.417 0.427 48163 314.25 700 1512 319
31 30 0.421 0.431 46619 310 870 1578 311
32 31 0.4213 0.43125 48532 305.75 595 1559 303.5
33 32 0.425 0.443 53965 316.25 943 1979 310.5
34 33 0.421 0.42975 49753 318.5 929 1755 312.5
35 34 0.425 0.4305 48741 305.5 831 1610 307
36 35 0.421 0.44325 54110 310.25 936 1878 301
37 36 0.421 0.45425 66539 329.25 952 1580 314.5
38 37 0.433 0.4405 49898 304 961 1792 316.5
39 38 0.417 0.4345 44963 315.75 742 1223 303
40 39 0.421 0.4385 47454 311.5 794 1738 307.5
41 40 0.421 0.449 45574 326.75 901 1550 320.5
42 41 0.421 0.4485 47744 311.5 852 1498 313.5
43 42 0.419 0.4345 73536 307 749 1356 301.5
44 43 0.421 0.42775 47069 304.75 962 1442 306
45 44 0.421 0.4385 48274 312.75 662 1530 305.5
46 45 0.425 0.424 45622 298.5 733 1547 296.5
47 46 0.421 0.4345 49046 311.5 707 1416 306.5
48 47 0.433 0.451 55492 320.5 900 1601 317
49 48 0.421 0.43725 47582 310.25 898 1381 300
50 49 0.421 0.43125 48387 312.5 915 1750 298.5
51 50 0.425 0.432 50200 339.75 892 1824 310.5
52 51 0.421 0.4415 50477 308.25 611 1437 314
53 52 0.421 0.43725 46715 319 621 1255 309.5
54 53 0.421 0.427 48242 315.25 898 1894 308.5
55 54 0.425 0.44275 53676 311.75 616 1517 321
56 55 0.423 0.42875 44882 305 850 1528 306.5
57 56 0.421 0.44 50493 310 817 1614 311
58 57 0.433 0.43725 55654 299.5 770 1617 300.5
59 58 0.421 0.43825 51200 306 852 1764 312.5
60 59 0.425 0.43925 54512 314.25 831 1797 328.5
61 60 0.421 0.44525 44352 303 656 1393 314.5
62 61 0.421 0.42975 49705 316.75 864 1648 314.5
63 62 0.421 0.43425 44480 298.25 716 1540 295
64 63 0.429 0.44275 50718 318.25 1029 1718 304.5
65 64 0.421 0.451 48435 323.5 691 1587 316
66 65 0.425 0.44125 53596 307 840 1904 312.5
67 66 0.421 0.44975 48387 321.25 721 1362 312.5
68 67 0.429 0.438 46301 301.25 793 1323 317.5
69 68 0.425 0.44775 45890 312.25 872 1393 312.5
70 69 0.417 0.43175 44850 312.75 831 1400 300
71 70 0.425 0.42225 42873 311.75 679 1220 303
72 71 0.425 0.434 43388 314.75 808 1202 320.5
73 72 0.421 0.43175 42391 301 667 1402 289.5
74 73 0.417 0.43775 47760 306 730 1503 314.5
75 74 0.425 0.43075 54399 305.25 821 1759 324
76 75 0.418 0.4335 51360 303 821 1642 304.5
77 76 0.421 0.445 60484 314.5 1029 1839 304.5
78 77 0.425 0.44375 55800 315 654 1610 314
79 78 0.421 0.44875 53611 316.75 609 1479 307
80 79 0.421 0.45475 53756 316 768 1648 323.5
81 80 0.417 0.449 53756 321.5 786 1440 317
82 81 0.417 0.4375 48226 316 854 1629 312.5
83 82 0.425 0.4385 49689 313.25 777 1535 316.5
84 83 0.418 0.437 42262 307.25 1025 1307 306.5
85 84 0.417 0.43675 44706 300.75 695 1351 310.5
86 85 0.417 0.4375 43146 308.75 714 1526 292.5
87 86 0.417 0.442 53048 306.75 662 1519 313.5
88 87 0.421 0.43175 48740 311.25 840 1542 298
89 88 0.417 0.43925 48290 307.5 656 1430 324
90 89 0.417 0.437 49110 309.5 723 1631 312.5
91 90 0.421 0.4225 46233 300 791 1507 299.5
92 91 0.417 0.455 48580 312 819 1533 324.5
93 92 0.421 0.458 52052 315.5 805 1545 318
94 93 0.417 0.4345 54126 299.5 774 1684 305
95 94 0.421 0.4425 52824 320.75 940 1671 323
96 95 0.421 0.435 46120 310 751 1334 311.5
97 96 0.421 0.43975 50959 319.25 679 1482 311.5
98 97 0.429 0.4455 58096 315.5 656 1852 328.5
99 98 0.433 0.44775 50059 321 653 1454 310
100 99 0.425 0.44575 54046 315.75 704 1264 327.5
101 100 0.421 0.439 49898 315.5 751 1552 310.5
102 101 0.429 0.44975 57244 323.25 985 1853 320.5
103 102 0.421 0.43325 45429 296 866 1407 306
104 103 0.429 0.443 47808 301.25 1062 1703 306.5
105 104 0.421 0.4445 48146 318.75 1003 1656 302
106 105 0.421 0.4385 52518 308.25 788 1699 305.5
107 106 0.421 0.4435 55267 318 998 1710 322.5
108 107 0.421 0.44 47262 311 639 1298 304
109 108 0.421 0.42675 50396 312.75 803 1760 304.5
110 109 0.425 0.43425 49673 298.5 845 1614 291
111 110 0.42419 0.439 47374 306.5 847 1652 319
112 111 0.417 0.43975 49223 315.5 590 1570 311
113 112 0.421 0.44475 54480 310.25 570 1479 312
114 113 0.421 0.437 45609 312 819 1465 301
115 114 0.425 0.439 54560 302.5 625 1437 304.5
116 115 0.421 0.435 51280 303.25 709 1704 305
117 116 0.429 0.4445 52808 317.25 681 1727 310
118 117 0.427 0.436475 47583 314.25 719 1404 320
119 118 0.429 0.441 48918 311.5 814 1647 305.5
120 119 0.429 0.4435 53113 305.25 606 1390 315
121 120 0.421 0.443 49062 305.75 765 1577 304
122 121 0.417 0.44925 51136 309.5 791 1547 616
123 122 0.417 0.4395 49110 311.75 649 1414 586
124 123 0.421 0.436 53483 312.75 579 1521 306
125 124 0.417 0.43475 50557 312.5 912 1545 307.5
126 125 0.417 0.4305 46410 305 942 1608 298
127 126 0.421 0.4395 50204 311.5 836 1701 315
128 127 0.417 0.43775 44754 317.75 940 1362 312.5
129 128 0.421 0.438 46233 313.25 793 1398 302
130 129 0.417 0.43975 44095 301.25 663 1379 300.5
131 130 0.419 0.42375 45799 307.5 684 1500 299.5
132 131 0.419 0.45375 55317 323.25 650 1510 320
133 132 0.417 0.433 46426 302.25 625 1349 314
134 133 0.417 0.441 53917 315 719 1829 305.5
135 134 0.417 0.43125 53097 307.25 614 1410 305
136 135 0.421 0.4365 48532 312 744 1484 301.5
137 136 0.417 0.41475 46024 308.25 536 1489 301
138 137 0.421 0.4315 44513 307.25 796 1486 311
139 138 0.421 0.43575 49942 312.5 924 1664 298.5
140 139 0.419 0.42475 50284 311.75 714 1545 310.5
141 140 0.421 0.436 44384 308 803 1339 310
142 141 0.417 0.43875 51763 309 598 1437 311
143 142 0.419 0.45425 52711 321.5 662 1393 311.5
144 143 0.421 0.44675 53370 314.75 858 1802 322.5
145 144 0.417 0.4325 48275 307.75 642 1578 300
146 145 0.417 0.4415 45429 311.75 662 1407 299
147 146 0.429 0.439 49705 305.25 710 1554 299
148 147 0.419 0.44175 47703 305.75 824 1680 318.5
149 148 0.417 0.42375 40944 300.75 688 1363 292.5
150 149 0.421 0.43 44738 301.5 684 1328 306.5
151 150 0.421 0.44825 48741 308.5 704 1550 325
152 151 0.421 0.4385 46940 312 728 1466 307
153 152 0.425 0.4455 55176 313.25 766 1713 308.5
154 153 0.421 0.433 39594 306 749 1129 309.5
155 154 0.421 0.437329 49416 311.25 714 1335 309.5
156 155 0.425 0.44275 48258 318.75 872 1421 313.5
157 156 0.421 0.43475 45984 319.25 532 1218 312.5
158 157 0.425 0.42925 50300 304.75 712 1404 287
159 158 0.417 0.44225 54930 316.5 842 1704 318
160 159 0.417 0.44175 46024 313.5 742 1554 310
161 160 0.421 0.426 47599 299.75 681 1309 298
162 161 0.421 0.43 45976 297.5 760 1158 290
163 162 0.421 0.42775 44095 310.5 646 1390 310
164 163 0.417 0.4435 47085 327.75 912 1358 335
165 164 0.417 0.43375 47438 305.25 807 1729 314.5
166 165 0.417 0.43125 43002 307.75 892 1507 327
167 166 0.425 0.425 44223 294.75 502 1110 309.5
168 167 0.425 0.44325 52776 298 668 1498 312.5
169 168 0.421 0.43775 50911 308.75 858 1552 302
170 169 0.421 0.4375 56360 309.75 616 1465 309.5
171 170 0.421 0.43275 56328 310.75 686 1500 321.5
172 171 0.421 0.4265 45300 309.75 789 1816 314
173 172 0.425 0.44275 45976 313.25 761 1265 316.5
174 173 0.421 0.43925 49712 318 718 1640 296.5
175 174 0.421 0.44675 47969 315.5 863 1742 312
176 175 0.425 0.4455 52984 314 910 1824 302
177 176 0.417 0.44275 57936 315.75 807 1944 317.5
178 177 0.425 0.43025 46265 306.5 642 1580 309
179 178 0.417 0.43775 49305 322 744 1680 305
180 179 0.421 0.4355 54270 317.25 618 1647 332.5
181 180 0.417 0.43075 49512 318.25 676 1646 300
182 181 0.417 0.44075 49608 297.75 712 1500 295.5
183 182 0.417 0.43025 45831 299 730 1433 298
184 183 0.421 0.43375 48435 304.25 639 1638 313.5
185 184 0.417 0.432 51152 308 744 1505 302
186 185 0.417 0.44175 51827 309 861 1456 322.5
187 186 0.417 0.4365 52647 315 794 1818 319
188 187 0.417 0.437 48886 310.75 872 1533 312.5
189 188 0.417 0.44425 50782 310.75 724 1535 323.5
190 189 0.421 0.44225 50911 306.25 537 1323 306.5
191 190 0.417 0.441 50252 308.5 796 1542 316.5
192 191 0.419 0.42725 48757 315.5 606 1387 312
193 192 0.421 0.43125 49480 309.5 733 1610 308
194 193 0.421 0.43425 52422 309.75 565 1629 318
195 194 0.417 0.42775 45204 303.25 653 1367 310
196 195 0.421 0.43325 50766 310 793 1558 302.5
197 196 0.417 0.43575 48596 301 744 1500 307.5
198 197 0.421 0.43525 56344 324 914 1890 310.5
199 198 0.421 0.43725 54496 320.25 831 1550 317.5
200 199 0.421 0.4355 38244 317.5 858 1127 310
201 200 0.421 0.431 46217 294 690 1325 310
202 201 0.421 0.435 56280 320 814 1759 324
203 202 0.417 0.44675 51618 327.75 602 1302 324
204 203 0.417 0.42825 46876 317.75 798 1561 318.5
205 204 0.421 0.442 50380 318.75 709 1194 315
206 205 0.433 0.43725 47937 306.25 950 1447 327
207 206 0.415 0.439 51088 318.5 793 1659 317.5
208 207 0.421 0.43925 50557 311.5 906 1794 311.5
209 208 0.425 0.4255 46924 306 663 1407 311.5
210 209 0.417 0.43525 46313 322.5 891 1384 315
211 210 0.419 0.4335 54372 303.5 672 1686 310
212 211 0.421 0.44275 60508 315.75 693 1626 342
213 212 0.421 0.432 49978 312 828 1608 321.5
214 213 0.417 0.43175 45044 314 719 1508 302.5
215 214 0.421 0.433 48837 319 761 1656 317
216 215 0.417 0.4355 47165 314 892 1540 325.5
217 216 0.419 0.452 57630 328.25 828 1617 1800
218 217 0.421 0.44 61303 314.25 721 1864 319
219 218 0.421 0.4445 52952 327.75 777 1516 319
220 219 0.421 0.4355 48966 315 721 1566 313.5
221 220 0.417 0.43475 52727 323 824 1729 310.5
222 221 0.417 0.4295 43548 308 707 1402 319
223 222 0.417 0.42875 45349 307.75 662 1577 312
224 223 0.421 0.4445 53129 324 677 1575 319
225 224 0.417 0.43225 54274 317.5 628 1564 328.5
226 225 0.425 0.447 48339 312.25 763 1288 326
227 226 0.417 0.43425 52100 307.75 822 1768 313
228 227 0.417 0.43025 49239 315.25 901 1950 323.5
229 228 0.416 0.438 47438 304.25 782 1530 307
230 229 0.417 0.43375 48274 308.25 716 1398 309
231 230 0.417 0.4445 48660 321.5 712 1608 317
232 231 0.421 0.433 50750 320.5 788 1587 320
233 232 0.417 0.436 48602 310 808 1692 309
234 233 0.417 0.44825 49673 320.5 623 1377 310
235 234 0.421 0.4305 46201 303.75 618 1432 325.5
236 235 0.417 0.43475 51272 307.25 632 1320 320
237 236 0.421 0.438 49110 311.5 864 1526 311.5
238 237 0.417 0.427 53419 307.5 684 1572 310.5
239 238 0.421 0.42125 42439 303.5 648 1312 302.5
240 239 0.421 0.42575 41732 305.75 791 1506 303
241 240 0.417 0.43025 42310 315.5 758 1330 301.5
242 241 0.417 0.4495 49384 327.5 842 1692 326.5
243 242 0.417 0.45525 51875 320.5 861 1813 316.5
244 243 0.413 0.43025 46008 297.5 775 1526 307.5
245 244 0.417 0.44675 55839 318.5 674 1703 331.5
246 245 0.421 0.4365 46097 306 905 1522 304.5
247 246 0.433 0.435 46056 313.75 672 1330 310
248 247 0.421 0.418 48853 303.5 686 1573 317
249 248 0.409 0.4265745 52342 313.5 793 1736 319
250 249 0.413 0.44225 47840 309.75 950 1616 319.5
251 250 0.409 0.4345 47760 314.5 698 1498 312.5
252 251 0.413 0.439 48821 309.25 763 1596 326
253 252 0.409 0.4325 43998 314.5 782 1424 318
254 253 0.425 0.42475 47985 308.25 738 1577 301.5
255 254 0.421 0.44675 46088 302.75 665 1176 299
256 255 0.425 0.4185 46040 309.75 814 1628 286.5
257 256 0.413 0.4345 47937 306 761 1384 178.5
258 257 0.417 0.43675 47503 308.25 644 1400 314.5
259 258 0.413 0.44525 44995 318.25 866 1502 320
260 259 0.421 0.44175 46410 310.75 714 1484 326
261 260 0.417 0.43675 49609 314.25 665 1656 302.5
262 261 0.419 0.44225 48773 426.6666667 866 1580 307.5
263 262 0.417 0.43275 48902 314.75 873 1563 310
264 263 0.417 0.441 46972 305.75 842 1575 311.5
265 264 0.413 0.4245 48419 297.75 726 1514 321
266 265 0.417 0.4485 54239 322.75 1031 1876 326.5
267 266 0.417 0.433 47551 302 835 1654 308
268 267 0.421 0.4435 50187 312.75 658 1414 305.5
269 268 0.421 0.4585 47069 309.5 747 1404 307.5
270 269 0.419 0.454 48387 319.25 859 1410 1774
271 270 0.417 0.437 50300 317 1040 1687 304.5
272 271 0.413 0.428 49271 304.5 784 1293 312
273 272 0.413 0.43125 48242 306.5 704 1479 315.5
274 273 0.413 0.45 56248 326 774 1549 309
275 274 0.417 0.4395 47607 301.5 660 1496 312
276 275 0.421 0.42475 46088 295 868 1586 310
277 276 0.417 0.452 48907 313.75 726 1578 310.5
278 277 0.417 0.4343335 50702 313.5 752 1488 303
279 278 0.417 0.4485 50091 321.5 929 1536 310
280 279 0.413 0.42725 45831 309.75 763 1631 310
281 280 0.417 0.432 52744 309.75 612 1592 319.5
282 281 0.413 0.43775 48821 309 803 1640 304
283 282 0.413 0.44075 49882 302.5 861 1712 311
284 283 0.417 0.43025 52302 319.25 802 1549 304
285 284 0.417 0.44 43975 310.75 668 1435 314
286 285 0.413 0.432 46394 306.75 882 1774 311.5
287 286 0.413 0.43925 46635 308 817 1120 304
288 287 0.417 0.43825 51790 305.25 1004 1528 305.5
289 288 0.417 0.41525 54994 303.5 751 1815 311.5
290 289 0.421 0.42275 47567 311.25 940 1617 286
291 290 0.421 0.4425 52132 302.5 756 1694 306.5
292 291 0.415 0.425 50959 306.25 1186 1832 306
293 292 0.417 0.43125 49078 312.25 1055 1768 322
294 293 0.421 0.439 45092 314.75 686 1498 305.5
295 294 0.421 0.4435 52551 305.75 772 1687 308.5
296 295 0.413 0.4475 49239 304 721 1564 313
297 296 0.417 0.436 53836 318.5 775 1785 322
298 297 0.417 0.4325 45478 318.25 950 1502 307.5
299 298 0.417 0.44925 45895 315.5 935 1654 329
300 299 0.421 0.42725 48066 304.75 763 1696 307
301 300 0.417 0.45175 51859 311.5 709 1638 312.5
302 301 0.417 0.4295 52406 319.75 722 1549 333
303 302 0.417 0.43475 51522 317.5 678 1547 337.5
304 303 0.417 0.4445 47808 324.25 962 1552 316.5
305 304 0.421 0.44075 52468 312.5 637 1626 317.5
306 305 0.421 0.43225 48692 299.25 642 1519 298.5
307 306 0.421 0.442 52518 321 976 1727 320.5
308 307 0.417 0.4375 53499 305 768 1519 315.5
309 308 0.429 0.445 54512 313 696 1913 326
310 309 0.417 0.437 44529 311.75 884 1426 315.5
311 310 0.417 0.43675 53852 318.5 1122 1976 313
312 311 0.417 0.44 52438 312.75 774 1648 307.5
313 312 0.417 0.42825 43902 305 761 1477 312.5
314 313 0.417 0.44025 50509 308.25 886 1746 309.5
315 314 0.417 0.4305 47937 308.25 882 1556 303
316 315 0.417 0.43475 48708 309.5 910 1703 312
317 316 0.417 0.43675 49834 313 735 1521 311.5
318 317 0.417 0.441 55251 324.25 980 2039 309
319 318 0.421 0.4085 46740 311.75 802 1648 300.5
320 319 0.423 0.4345 50654 315.75 744 1508 321
321 320 0.421 0.4265 46780 305.25 779 1507 311.5
322 321 0.429 0.44075 48926 317.75 660 1701 326.5
323 322 0.437 0.578333333 57936 313.75 940 1932 316
324 323 0.421 0.44525 47969 316.75 738 1500 316.5
325 324 0.421 0.445 49271 304.5 733 1656 311.5
326 325 0.423 0.4385 51297 301 807 1587 317.5
327 326 0.429 0.432275 47390 426.25 716 1508 306.5
328 327 0.421 0.4355 49516 309.5 730 1475 294.5
329 328 0.421 0.4355 50606 313 821 1750 305.5
330 329 0.421 0.43225 51988 304.25 863 1764 312.5
331 330 0.417 0.427 47197 298.75 840 1600 300
332 331 0.421 0.4315 51972 318.75 822 1566 322.5
333 332 0.421 0.4575 58000 343.25 1060 1773 334
334 333 0.417 0.41725 42150 302.25 775 1524 316
335 334 0.417 0.445 60476 317.5 795 1748 311
336 335 0.441 0.453 60202 306.25 943 1953 327.5
337 336 0.419 0.429 48982 310.5 840 1598 310.5
338 337 0.421 0.43825 49962 309 852 1535 328.5
339 338 0.425 0.44725 57052 325.75 1017 2044 327.5
340 339 0.417 0.4385 50975 320.5 833 1631 302
341 340 0.417 0.45175 56537 318.5 793 1774 312.5
342 341 0.421 0.43825 50139 319.75 887 1788 318.5
343 342 0.425 0.43175 49898 306 872 1605 299.5
344 343 0.417 0.4445 49207 316.75 793 1356 318
345 344 0.421 0.43975 53547 317 826 1804 307
346 345 0.417 0.4385 47101 312 707 1503 309.5
347 346 0.413 0.42 45027 313 735 1636 322.5
348 347 0.417 0.436 53579 309.5 670 1771 310
349 348 0.417 0.443 53692 309.5 740 1762 307.5
350 349 0.423 0.43075 55332 317.25 1034 1843 315.5
351 350 0.421 0.43875 54672 305.25 990 1769 304
352 351 0.421 0.431 48564 308.5 943 1690 321.5
353 352 0.419 0.445 55412 328.25 1046 1846 315
354 353 0.419 0.4485 48998 313.25 959 1522 315.5
355 354 0.417 0.441 45558 314 644 1339 309.5
356 355 0.425 0.439 52454 307.5 744 1703 311.5
357 356 0.417 0.429 53901 315.25 733 1656 314
358 357 0.417 0.4345 49737 316.25 742 1412 316
359 358 0.417 0.44275 52824 317.25 684 1653 320
360 359 0.419 0.43525 50268 313.25 1139 1656 314
361 360 0.417 0.436 52302 309.75 746 1682 294.5
362 361 0.419 0.43475 51522 312.75 957 1852 316.5
363 362 0.417 0.44425 55312 321.25 934 1643 327.5
364 363 0.417 0.425 47326 306 681 1684 299.5
365 364 0.417 0.446 48403 311.75 875 1787 317.5
366 365 0.417 0.441 48274 302 833 1731 308.5
367 366 0.421 0.44125 48290 315 732 1516 316.5
368 367 0.421 0.43925 52357 314 730 1687 306.5
369 368 0.421 0.43525 52031 305.75 938 1659 312.5
370 369 0.421 0.4375 53290 311.75 952 1703 314
371 370 0.425 0.44075 58000 308 980 2014 318.5
372 371 0.417 0.439 55653 320 878 1824 314.5
373 372 0.417 0.4235 44690 298.25 957 1524 300.5
374 373 0.417 0.43775 49223 305 905 1701 307
375 374 0.423 0.434 49078 312.25 889 1638 309.5
376 375 0.419 0.429 49094 312.25 914 1750 293.5
377 376 0.419 0.42675 47165 303.25 870 1680 302.5
378 377 0.417 0.4325 49850 307.75 734 1530 316
379 378 0.413 0.43875 53338 311 782 1843 308
380 379 0.417 0.4325 53322 317 908 1843 311
381 380 0.417 0.429 46956 297 940 1594 314
382 381 0.421 0.439 56232 315 1048 2007 314
383 382 0.421 0.44975 49448 313 1090 2030 316.5
384 383 0.417 0.448 43709 317.5 985 1596 314
385 384 0.417 0.4525 54528 312.75 970 1685 317.5
386 385 0.419 0.426 45863 300.5 920 1704 293.5
387 386 0.419 0.424 46458 315.25 920 1577 295.5
388 387 0.417 0.432 46876 313.5 707 1267 319
389 388 0.417 0.439 50589 318.5 777 1379 304
390 389 0.419 0.4175 44610 294.75 658 1368 303.5
391 390 0.419 0.44675 45751 313.5 817 1440 302.5
392 391 0.425 0.441 53531 308.5 980 1522 285.5
393 392 0.425 0.4425 55669 304.5 732 1804 311.5
394 393 0.417 0.433 48307 310 702 1503 298.5
395 394 0.417 0.4455 54785 328.75 1022 1992 314
396 395 0.413 0.433 46634 309.25 793 1549 310
397 396 0.421 0.436 52534 310.5 1068 1895 297.5
398 397 0.425 0.44225 54464 304.75 964 1852 300.5
399 398 0.425 0.41925 45670 298 794 1568 303
400 399 0.417 0.4495 57743 322.5 905 1652 321
401 400 0.419 0.443 52390 307.75 934 1748 307.5
402 401 0.417 0.4255 48146 303.25 786 1516 320.5
403 402 0.417 0.439 53113 319.75 922 1512 310
404 403 0.417 0.44825 55653 310.25 780 1561 313.5
405 404 0.421 0.452 51762 311.25 987 1805 315
406 405 0.421 0.43225 57020 303 810 1841 310
407 406 0.417 0.4415 45124 307.5 875 1564 302
408 407 0.417 0.44275 52020 323.25 746 1662 317
409 408 0.421 0.44725 44786 313.25 733 1253 330
410 409 0.417 0.4215 45928 297.25 772 1592 294
411 410 0.417 0.444 65346 321.75 875 1866 336
412 411 0.417 0.45075 54608 324.5 808 1720 333.5
413 412 0.417 0.44425 65266 317.25 704 1801 331.5
414 413 0.417 0.423 42326 301.5 707 1208 311
415 414 0.417 0.44975 56264 302.5 861 1956 306
416 415 0.417 0.44325 50814 330 1029 1699 319
417 416 0.417 0.435 47920 323.5 800 1549 317
418 417 0.417 0.448 47165 319.75 996 1543 318
419 418 0.417 0.44975 51056 319.5 821 1488 306.5
420 419 0.417 0.4405 48724 307 700 1430 288
421 420 0.419 0.43625 45574 308.25 830 1533 334.5
422 421 0.419 0.42425 48773 305 1015 1694 315
423 422 0.425 0.4275 48242 302.25 971 1470 303.5
424 423 0.417 0.434 47503 306.5 718 1507 324
425 424 0.419 0.442 60508 309.5 737 1682 302.5
426 425 0.417 0.444 54062 318 884 1535 247.5
427 426 0.419 0.4235 45059 300 1001 1619 313.5
428 427 0.423 0.438 52164 299.25 920 1802 315
429 428 0.419 0.418 47937 304.25 921 1794 304
430 429 0.425 0.445 51457 300 893 1526 305
431 430 0.421 0.44025 53017 311.25 887 1575 298
432 431 0.417 0.44625 59351 323.5 789 1941 322
433 432 0.417 0.436 44749 310 789 1351 309.5
434 433 0.417 0.45075 59578 316.5 934 1818 334
435 434 0.419 0.4415 61167 325.25 1034 1992 321.5
436 435 0.425 0.43925 53016 308 1004 1780 305
437 436 0.419 0.42675 52551 294.5 641 1636 303
438 437 0.419 0.4505 57839 328 1172 1990 331
439 438 0.421 0.4405 57325 301.5 718 1545 311
440 439 0.425 0.44025 46554 303.75 896 1530 1862.5
441 440 0.428 0.45475 59752 316.5 810 1834 319
442 441 0.421 0.44725 52148 298 686 1550 307.5
443 442 0.429 0.431 52936 306.75 929 1743 303.5
444 443 0.417 0.4375 43034 307.75 791 1272 309.5
445 444 0.421 0.42575 46586 307.5 714 1675 310
446 445 0.421 0.43825 52792 321.5 875 1839 324
447 446 0.417 0.4235 47905 302.25 749 1650 314.5
448 447 0.421 0.449 52262 312.5 886 1741 319.5
449 448 0.421 0.442 51313 308 1024 1542 303.5
450 449 0.417 0.44225 56087 320.5 826 1486 324
451 450 0.417 0.44425 52204 310.25 868 1671 307.5
452 451 0.417 0.437 49400 316.75 947 1654 311
453 452 0.425 0.43525 46554 313.25 929 1608 315
454 453 0.417 0.44025 47310 312.5 1116 1750 316.5
455 454 0.421 0.443 53596 311 962 1754 298
456 455 0.417 0.453 57426 312.5 1024 2135 318
457 456 0.433 0.4435 53933 309.5 1183 1830 304
458 457 0.421 0.446 49030 316.75 1085 1930 310
459 458 0.421 0.432 49448 314 1036 1932 296
460 459 0.421 0.4455 48998 320.5 1148 1680 312
461 460 0.413 0.451 54769 301 816 1853 304
462 461 0.413 0.4425 54059 313.5 1017 1852 299.5
463 462 0.417 0.42925 47889 312.5 968 1675 309.5
464 463 0.417 0.444 55235 311.5 878 1754 300
465 464 0.417 0.4525 51699 310.25 931 1698 308
466 465 0.417 0.432 42809 307 906 1465 303.5
467 466 0.417 0.437 45526 301.25 796 1544 302
468 467 0.421 0.43375 55396 328.25 926 1995 305
469 468 0.421 0.43225 46298 304.75 948 1902 306.5
470 469 0.425 0.4355 50477 304 936 1908 297
471 470 0.417 0.44525 46988 307.5 989 1589 309.5
472 471 0.417 0.42975 41169 299.25 931 1295 290.5
473 472 0.421 0.433 47251 298.75 1029 1577 312.5
474 473 0.421 0.44 50557 314 1097 1844 302.5
475 474 0.421 0.438 48130 313.75 1172 1787 311
476 475 0.417 0.42625 47953 300.5 1026 1857 292
477 476 0.425 0.445 53515 314.75 1143 1692 313.5
478 477 0.421 0.446 56972 314.5 858 1832 324.5
479 478 0.417 0.4555 56328 315 772 1886 323.5
480 479 0.421 0.449 46683 313.25 866 1776 311
481 480 0.417 0.45925 42714 318.5 875 1472 310
482 481 0.417 0.43375 45176 306.5 882 1585 306.5
483 482 0.421 0.45275 53354 310 915 1696 313
484 483 0.421 0.45 62887 335 1099 2053 309.5
485 484 0.421 0.441 48724 299.25 1004 1596 283
486 485 0.417 0.42275 41780 306.25 1069 1466 296.5
487 486 0.421 0.43025 43789 296.5 1031 1549 304.5
488 487 0.417 0.43075 52550 313 864 1362 313.5
489 488 0.421 0.43525 47872 317.25 782 1642 327.5
490 489 0.421 0.4385 47889 315.5 878 1642 303
491 490 0.417 0.425 48808 317.25 828 1617 301.5
492 491 0.417 0.43775 45510 318.5 770 1444 319
493 492 0.417 0.424 47598 292.75 707 1342 292
494 493 0.417 0.4315 51248 316.5 802 1820 317
495 494 0.417 0.4425 49207 313 849 1620 314
496 495 0.425 0.44475 55058 310.5 770 1636 313
497 496 0.423 0.443 50007 306.75 1078 1820 296.5
498 497 0.421 0.4325 56216 310.25 756 1839 319.5
499 498 0.417 0.44625 52920 316 1150 1897 325.5
500 499 0.417 0.45675 49834 306.5 915 1766 315.5
501 500 0.425 0.4455 49593 315.75 914 1614 1808
502 501 0.421 0.44175 52245 319.25 1052 1886 317
503 502 0.421 0.4505 56039 316.75 1057 1962 329
504 503 0.417 0.443 46699 313.25 784 1594 326
505 504 0.421 0.4395 47438 305 931 1846 304.5
506 505 0.421 0.441 45027 306 850 1610 311.5
507 506 0.421 0.43025 46136 305.5 854 1626 315.5
508 507 0.421 0.433 45092 310 833 1582 307
509 508 0.417 0.4345 50862 321.25 1092 1934 296.5
510 509 0.417 0.4395 51200 306.75 805 1746 301
511 510 0.417 0.43675 51602 302.75 634 1426 289
512 511 0.417 0.4305 49071 303.75 850 1606 304
513 512 0.417 0.435 47776 304.75 796 1463 304
514 513 0.417 0.446 50605 321 686 1503 302.5
515 514 0.417 0.444 54158 321 910 1766 321.5
516 515 0.417 0.435 47390 308.25 864 1762 298.5
517 516 0.417 0.42775 44561 299 835 1542 305
518 517 0.421 0.4535 56167 318.5 864 1787 317
519 518 0.421 0.432 42359 315 976 1463 330.5
520 519 0.421 0.43675 42841 310.25 970 1416 313
521 520 0.425 0.43425 52856 324 1118 1771 306.5
522 521 0.425 0.444 50107 314 955 1788 300.5
523 522 0.421 0.43575 52277 308.75 760 1566 300.5
524 523 0.425 0.4545 50589 319.75 917 1614 323.5
525 524 0.417 0.4435 50621 318.75 1158 1864 309
526 525 0.421 0.425 47229 295.75 833 1558 314
527 526 0.417 0.458 53242 323.75 976 1815 303.5
528 527 0.417 0.4475 51474 319.75 858 1706 321.5
529 528 0.417 0.4435 46780 305.25 816 1638 325
530 529 0.421 0.4275 46281 306.5 873 1603 299.5
531 530 0.417 0.44175 45140 305 976 1886 306.5
532 531 0.417 0.4265 40012 294 914 1318 293.5
533 532 0.417 0.4225 45429 303.25 934 1561 296.5
534 533 0.417 0.44375 45879 312.75 1012 1734 324
535 534 0.417 0.437 44063 312 928 1713 302
536 535 0.417 0.433 44625 313.25 849 1255 302
537 536 0.413 0.42525 46538 310.25 970 1325 310
538 537 0.421 0.443 48701 320 850 1628 310
539 538 0.425 0.43975 50959 316.25 1045 1654 309.5
540 539 0.421 0.42775 42954 306.5 900 1505 314.5
541 540 0.417 0.42875 52872 317.75 812 1678 309
542 541 0.417 0.4295 49994 305.25 882 1668 304.5
543 542 0.417 0.42425 47583 313.75 852 1741 322.5
544 543 0.413 0.42775 49930 315 954 1715 311.5
545 544 0.413 0.4455 53885 304.25 931 1892 301
546 545 0.417 0.43125 48934 311 793 1349 308.5
547 546 0.421 0.433 46731 305.75 800 1536 312
548 547 0.417 0.45175 53017 323.75 747 1766 314
549 548 0.417 0.4575 51216 323 800 1740 348
550 549 0.421 0.43075 61440 307 954 2070 305.5
551 550 0.433 0.4375 54094 303.25 858 1871 308
552 551 0.417 0.42775 45172 309.5 936 1484 305
553 552 0.417 0.4215 43918 302.75 872 1556 299
554 553 0.417 0.44625 47872 411.6666667 758 1456 308.5
555 554 0.417 0.434 47503 313.5 718 1549 283.5
556 555 0.417 0.456 57646 315.25 826 1771 326
557 556 0.417 0.4325 52100 310.5 766 1764 310.5
558 557 0.417 0.44075 42696 306.75 968 1461 319.5
559 558 0.413 0.42925 48338 316.75 679 1362 308.5
560 559 0.413 0.441 49190 316 649 1540 333.5
561 560 0.417 0.42825 42873 312 901 1438 309.5
562 561 0.433 0.435 47214 302 1200 1676 357.5
563 562 0.417 0.43225 52052 301.75 793 1657 317
564 563 0.415 0.43275 49239 317 896 1843 299
565 564 0.415 0.43 50428 313.5 1036 1740 308.5
566 565 0.413 0.441 44931 306.75 830 1586 307
567 566 0.433 0.45775 47728 323.25 740 1461 310
568 567 0.421 0.4465 52534 309.25 756 1852 312.5
569 568 0.417 0.4395 51522 308.25 698 1866 335.5
570 569 0.417 0.4295 52068 320.75 1031 1760 318.5
571 570 0.421 0.4405 48483 309.25 1074 1533 308
572 571 0.417 0.44725 53226 306.75 1015 1787 320.5
573 572 0.417 0.42175 42037 288.5 728 1345 299.5
574 573 0.421 0.41775 44320 284 728 1521 292
575 574 0.413 0.43425 47856 304.25 864 1439 299
576 575 0.417 0.43175 46780 306.25 971 1564 299
577 576 0.417 0.43 52599 306.25 870 1778 316
578 577 0.417 0.43375 53901 302.25 774 1759 297
579 578 0.417 0.45225 55267 312.75 744 1897 329.5
580 579 0.413 0.45325 47198 319.25 987 1521 308
581 580 0.421 0.4255 44963 306.5 804 1701 312
582 581 0.415 0.418 44658 304.75 868 1547 309.5
583 582 0.417 0.43925 54432 322.25 948 1811 306
584 583 0.417 0.4485 54142 326.25 1169 1934 312.5
585 584 0.417 0.4425 47149 328 1104 1620 323
586 585 0.417 0.4525 55572 308.5 872 1746 322
587 586 0.421 0.44225 48628 313.75 936 1624 302
588 587 0.409 0.44575 47117 323.75 905 1493 321.5
589 588 0.417 0.4505 50590 323.75 990 1738 310.5
590 589 0.417 0.44 58965 307.5 896 1899 311
591 590 0.417 0.43475 51972 313.75 882 1785 307
592 591 0.417 0.44325 48210 304.5 856 1564 309.5
593 592 0.421 0.435 51788 312 959 1421 329
594 593 0.409 0.44775 51554 313.25 780 1804 322.5
595 594 0.413 0.43 48178 314 817 1642 316.5
596 595 0.433 0.44175 49770 308 788 1577 305.5
597 596 0.417 0.45375 54801 311.5 821 1746 311
598 597 0.409 0.443 48596 306 693 1521 305
599 598 0.417 0.44275 51779 310 849 1687 310.5
600 599 0.417 0.44925 48226 302.75 850 1920 314
601 600 0.413 0.43925 51297 318.75 970 1846 307
602 601 0.417 0.43358 49046 314.75 970 1906 318
603 602 0.417 0.436 47294 313 971 1619 311.5
604 603 0.417 0.45 49834 313 896 1456 303
605 604 0.413 0.4375 43088 306 919 1497 314.5
606 605 0.415 0.463 58836 313.75 1004 2034 317.5
607 606 0.413 0.455 43902 317.25 912 1586 317
608 607 0.417 0.437 49721 305 761 1678 313.5
609 608 0.417 0.4345 44111 304 844 1720 312.5
610 609 0.417 0.4515 54334 316.5 877 1918 311
611 610 0.425 0.43825 44336 304.5 794 1418 318.5
612 611 0.413 0.42875 43998 305 802 1582 303
613 612 0.413 0.4445 47953 325 978 1549 317.5
614 613 0.417 0.45125 48387 326.5 966 1923 330.5
615 614 0.417 0.4365 55621 314.25 1040 2174 326.5
616 615 0.417 0.439 47891 302.75 1003 1657 320
617 616 0.413 0.43925 50782 311 696 1458 310.5
618 617 0.417 0.43675 52631 313.25 1080 1981 310
619 618 0.433 0.44725 54383 323 998 1783 330
620 619 0.425 0.44 48757 316 1024 1550 313
621 620 0.417 0.42875 48564 305.75 877 1880 299
622 621 0.425 0.44375 48001 310 945 1568 306
623 622 0.419 0.40975 46956 304.75 1076 1790 313
624 623 0.425 0.43875 51924 315 870 1684 303
625 624 0.425 0.42825 46780 302.5 842 1633 315.5
626 625 0.417 0.4435 46506 306.5 926 1568 307
627 626 0.417 0.44175 56328 320 1101 2116 304.5
628 627 0.417 0.42375 42150 313.5 901 1470 323.5
629 628 0.417 0.43425 45590 304.5 696 1446 309
630 629 0.421 0.4290525 52310 300.5 796 1687 316.5
631 630 0.417 0.4295 48644 417.6666667 833 1722 313
632 631 0.417 0.4555 48580 303.5 772 1419 293.5
633 632 0.417 0.4355 43548 299.75 807 1423 299.5
634 633 0.425 0.4215 43580 298.5 940 1516 299.5
635 634 0.425 0.445 48371 305 891 1568 312
636 635 0.425 0.44625 47664 315.5 884 1594 322.5
637 636 0.421 0.43525 45494 311.25 966 1620 305.5
638 637 0.421 0.438 52100 306 770 1724 314
639 638 0.421 0.44625 59334 316.25 912 2170 322
640 639 0.417 0.4425 48258 326 989 1799 314
641 640 0.421 0.43025 49126 311.75 1003 1526 300
642 641 0.413 0.4465 47053 316.75 761 1668 321
643 642 0.413 0.43975 45638 309.5 854 1517 315
644 643 0.421 0.4205 47374 299 863 1769 315
645 644 0.421 0.437 46522 300 842 1678 317
646 645 0.421 0.432 43146 297.75 747 1382 295.5
647 646 0.417 0.42925 46274 321.75 1018 1519 318
648 647 0.417 0.423 44208 304.75 980 1608 286.5
649 648 0.417 0.42525 47245 311.25 984 1535 301.5
650 649 0.425 0.46625 50139 314.25 910 1561 304
651 650 0.421 0.432 51747 312.75 872 1549 317.5
652 651 0.421 0.424 42278 307.25 854 1433 304
653 652 0.429 0.44425 50548 311.75 864 1496 313
654 653 0.421 0.42675 42970 294.25 770 1354 287.5